| Call Number | 11116 |
|---|---|
| Day & Time Location |
R 1:10pm-3:40pm 337 Seeley W. Mudd Building |
| Points | 3 |
| Grading Mode | Standard |
| Approvals Required | None |
| Instructor | P J Schuck |
| Type | LECTURE |
| Method of Instruction | In-Person |
| Course Description | MEMS markets and applications; scaling laws; silicon as a mechanical material; Sensors and actuators; micromechanical analysis and design; substrate (bulk) and surface micromachining; computer aided design; packaging; testing and characterization; microfluidics. |
| Web Site | Vergil |
| Department | Mechanical Engineering |
| Enrollment | 28 students (30 max) as of 11:06AM Friday, October 31, 2025 |
| Subject | Mechanical Engineering |
| Number | E4212 |
| Section | 001 |
| Division | School of Engineering and Applied Science: Graduate |
| Section key | 20253MECE4212E001 |