Fall 2024 Mechanical Engineering E4212 section 001

MICROELECTROMECHANICAL SYSTEMS

Call Number 13811
Day & Time
Location
R 1:10pm-3:40pm
503 Hamilton Hall
Points 3
Grading Mode Standard
Approvals Required None
Instructor P J Schuck
Type LECTURE
Method of Instruction In-Person
Course Description

MEMS markets and applications; scaling laws; silicon as a mechanical material; Sensors and actuators; micromechanical analysis and design; substrate (bulk) and surface micromachining; computer aided design; packaging; testing and characterization; microfluidics.

Web Site Vergil
Department Mechanical Engineering
Enrollment 27 students (30 max) as of 5:06PM Monday, December 2, 2024
Subject Mechanical Engineering
Number E4212
Section 001
Division School of Engineering and Applied Science: Graduate
Section key 20243MECE4212E001